aanidaani
Aug17-09, 08:18 PM
My research group is considering purchasing a new sputtering system for our lab and I've found two configurations for the sputter sources: "sputter up" and "sputter down." What are the advantages/disadvantages of each configuration?
Sputter-up Diagram
http://i32.tinypic.com/10nwd2o.jpg
Sputter-down Diagram
http://i32.tinypic.com/1zbeago.jpg
Source: AJA Orion Sputter System (http://www.ajaint.com/systems_orion.htm)
Sputter-up Diagram
http://i32.tinypic.com/10nwd2o.jpg
Sputter-down Diagram
http://i32.tinypic.com/1zbeago.jpg
Source: AJA Orion Sputter System (http://www.ajaint.com/systems_orion.htm)