|Mar6-12, 03:38 AM||#1|
silvaco simulation with athena atlas
I have a question about silvaco athena && atlas simulation, MOS structure, when I gate length is 0.6um, get Vth is 1.8V, but I only change gate length to 0.55um, get Vth is 1.6V, it's a error data I know, but I do not know why, what wrong with the program, how can I change it. would you please help about it. Very thanks!
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