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Electron beam litography

by aaaa202
Tags: beam, electron, litography
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aaaa202
#1
Jan21-14, 10:11 AM
P: 1,005
In an article I am reading gold wires a fabricated on top of a substrate using electron beam litography.
How exactly does a procedure like this work? Electron beam litography uses a beam of electrons to pattern a substrate. What exactly does this pattern consist of and how can it be used to fabricate gold on top of the substrate?
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Hypersphere
#2
Jan21-14, 10:27 PM
P: 181
If you are asking about the technique rather than the detailed physical processes, note that photolithography works essentially the same way, but is usually much better explained. That wikipedia page illustrates it quite nicely with that figure. Electron beam lithography uses some other chemicals, and you tend to have to work a lot to get really good resolution but if you substitute the word "electron beam resist" for "photoresist", the concepts remain the same.


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