Lithium fluoride (LiF) etching/patterning possible?


by DivGradCurl
Tags: fluoride, lithium
DivGradCurl
DivGradCurl is offline
#1
Nov3-13, 05:15 PM
P: 350
Does any of you know about Lithium fluoride (LiF) etching/patterning?

I'm wondering if I can pattern a slab of LiF as if it were SiO2 glass: standard lithography, followed by etch. But I haven't found anything in the literature about LiF etching experiments. I'd like to use dry etch chemistry if that's possible.

Thanks
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Alkim
Alkim is offline
#2
Nov12-13, 04:08 PM
P: 98
LiF is soluble in HNO3 and H2SO4 but I wouldn't recommend you to do that since produced HF is very dangerous.
etudiant
etudiant is offline
#3
Nov12-13, 06:35 PM
PF Gold
P: 849
Do you have access to even an older fab? Plasma etch is pretty catholic in terms of material it will interact with.


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