Register to reply

What is "Proximity Effect Control" in ebeam lithography?

by samin
Tags: ebeam, lithography
Share this thread:
samin
#1
Jul9-14, 12:07 PM
P: 1
Hello all,

Can somebody explain to me what PEC (proximity effect control) means in nanofabrication?

Thanks
:)
Phys.Org News Partner Engineering news on Phys.org
Lawsuits challenge US drone, model aircraft rules
CU-Boulder leads international unmanned aircraft testing event at Pawnee Grassland
Gesture-controlled, autonomous vehicles may be valuable helpers in logistics and trans-shipment centers
Greg Bernhardt
#2
Jul29-14, 02:11 PM
Admin
Greg Bernhardt's Avatar
P: 9,491
I'm sorry you are not finding help at the moment. Is there any additional information you can share with us?


Register to reply

Related Discussions
Sheldon Axler's "Algebra & Trigonometry" vs. "Precalculus: A Prelude." Science & Math Textbooks 30
Difficulty understanding "donor" and "acceptor" energy levels. Atomic, Solid State, Comp. Physics 6
"Special" and "General" relativity- Who invented those terms? Special & General Relativity 2
How is "cross sectional area" different from "area"? Introductory Physics Homework 5