Question re. electroplated gold. Thank you!


by lodgezhao
Tags: electroplated, gold
lodgezhao
lodgezhao is offline
#1
Jul17-13, 12:32 PM
P: 1
Hello, I have a question for electrodeposition of gold.

So I tried to electroplate gold on a Si wafer with gold seed layer on it. I used SU-8 as my photoresist to form a pattern. But my electroplated gold was black and granular.

Area is 19mm^2 and desired thickness is 50 um. I set the effective current to be 1.9 mA.

Any ideas?

Thank you so much!!!!!
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Graniar
Graniar is offline
#2
Jul18-13, 03:56 AM
P: 71
1. Try to reduce current, 100A/m^2 may be too much for electroplating.
2. What kind of electrolite do you use? Normally, it should slightly dissolve gold to remove defects of growing layer.


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