Register to reply

What is "Proximity Effect Control" in ebeam lithography?

by samin
Tags: ebeam, lithography
Share this thread:
samin
#1
Jul9-14, 12:07 PM
P: 1
Hello all,

Can somebody explain to me what PEC (proximity effect control) means in nanofabrication?

Thanks
:)
Phys.Org News Partner Engineering news on Phys.org
Student develops filter for clean water around the world
Developing the next evolution in underwater communication
Compact vibration harvester power supply with highest efficiency opens door to "fix-and-forget" sensor nodes

Register to reply

Related Discussions
Sheldon Axler's "Algebra & Trigonometry" vs. "Precalculus: A Prelude." Science & Math Textbooks 30
Difficulty understanding "donor" and "acceptor" energy levels. Atomic, Solid State, Comp. Physics 6
"Special" and "General" relativity- Who invented those terms? Special & General Relativity 2
How is "cross sectional area" different from "area"? Introductory Physics Homework 5