- #1
guorenguoren
- 5
- 0
hi,
everyone, now I am trying to deposite some metal layers on micro-scale cantilever surface on the purpose of bending it under the residual stress caused by metal deposition. I read some literatures which mentioned and even gave the exact value of residual stress happened in both the cantilever and metal layer. So I wonder how to get those values by calculation if the deposition is through sputtering system or by any experimental ways.
Thank you.
everyone, now I am trying to deposite some metal layers on micro-scale cantilever surface on the purpose of bending it under the residual stress caused by metal deposition. I read some literatures which mentioned and even gave the exact value of residual stress happened in both the cantilever and metal layer. So I wonder how to get those values by calculation if the deposition is through sputtering system or by any experimental ways.
Thank you.