Determining the behaviour of a wafer from the CV curves

[bhavi]

After conducting CV measurements on Thin Film semiconductor wafers, how do we determine the behavior of the wafer based on the measurements? I have a sample of the reading obtained. I would be glad if anyone can help me.

 

[berkeman]

After conducting CV measurements on Thin Film semiconductor wafers, how do we determine the behavior of the wafer based on the measurements? I have a sample of the reading obtained. I would be glad if anyone can help me.

Welcome to the PF. You should post a PDF file instead of a ZIP file. Less likely to have virus problems that way.

 

[oswaler]

To determine the behavior of a wafer based on CV curves, we need to analyze the shape and characteristics of the curves. CV curves, or capacitance-voltage curves, provide information about the electrical properties of a material, specifically its capacitance and voltage response.

First, we need to look at the shape of the curve. A typical CV curve for a semiconductor wafer will show a gradual increase in capacitance as the voltage is swept from negative to positive values, followed by a sudden drop in capacitance at a certain voltage point. This point is known as the flatband voltage and it represents the point at which the semiconductor switches from being depleted to being inverted. This can provide information about the doping level and type of the wafer.

Next, we need to look at the slope of the curve. The slope of the CV curve at the flatband voltage can provide information about the carrier concentration of the wafer. A steeper slope indicates a higher carrier concentration, while a flatter slope indicates a lower carrier concentration.

Additionally, the presence of any peaks or dips in the curve can indicate the presence of defects or impurities in the wafer. These defects can affect the electrical behavior of the wafer and may need to be addressed in order to improve its performance.

Overall, by analyzing the shape, slope, and any abnormalities in the CV curve, we can determine the behavior of a wafer and identify any potential issues that may need to be addressed.