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What Etches Ruthenium Dioxide |
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| Apr21-10, 09:31 AM | #1 |
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What Etches Ruthenium Dioxide
I've been trying to find a wet etch procedure for Ruthenium Dioxide (RuO2). Anybody know of a procedure or have links to a paper that describes it. Any help would be appreciated.
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| ruthenium, ruthenium dioxide, ruthenium oxide, wet etch |
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