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Ideas for new capping layer technique

 
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Jul23-10, 06:48 AM   #1
 

Ideas for new capping layer technique


Hi everybody

I am searching for ideas and literature.
In the usual process, metal is evaporated in the gaps of a polymer. To prevent oxydation of the evaporated metal a capping layer as protection is evaporated.
But I need a capping layer around a metal structure, see figure.

Does anyone know literature about it?
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cappinglayer.jpg  
 
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capping, capping layer, evaporate, evaporation
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