|Jul23-10, 06:48 AM||#1|
Ideas for new capping layer technique
I am searching for ideas and literature.
In the usual process, metal is evaporated in the gaps of a polymer. To prevent oxydation of the evaporated metal a capping layer as protection is evaporated.
But I need a capping layer around a metal structure, see figure.
Does anyone know literature about it?
|capping, capping layer, evaporate, evaporation|
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