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Ideas for new capping layer technique |
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| Jul23-10, 06:48 AM | #1 |
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Ideas for new capping layer technique
Hi everybody
I am searching for ideas and literature. In the usual process, metal is evaporated in the gaps of a polymer. To prevent oxydation of the evaporated metal a capping layer as protection is evaporated. But I need a capping layer around a metal structure, see figure. Does anyone know literature about it? |
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| capping, capping layer, evaporate, evaporation |
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