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MEMS question

by Michaud12
Tags: mems
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Mar16-11, 01:21 PM
P: 20
ok so i need to find the resonance frequency of a accelometer, with 4 tethers/anchors.

so in a assignment before this for a 2 beam system i used

f= (k/2pi)*sqrroot[(ET^2)/12p*L^4]

p being density

so do i just times this by 2? and do i only use the density of the tethers or of the shuttle mass that has silicon and gold
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