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Effect of annealing temperature on Capacitance of MOS-C

 
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Mar27-12, 03:58 AM   #1
 

Effect of annealing temperature on Capacitance of MOS-C


I want to know the effect of annealing on the capacitance of MOS-C. Why?
When I annealed my MOS-C it is showing the response of a parallel plate capacitor.
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capacitance, moscap, temperature

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