|Jul27-12, 03:52 AM||#1|
Surface Analysis technique for insulating substrates
I have a CMOS chip and believe there to be an unwanted insulating layer above a metallic pad. My first thought was to use Auger spectroscopy to examine the surface composition however Auger can only be used on conducting materials - my substrate is insulating.
My question; is there a surface spectroscopy technique suitable for examining insulating substrates? My guess is SIMS should work but I am novice in this topic!
Any help will be warmly received!
|auger, sims, surface analysis|
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