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Al/Au adhesion

  1. May 26, 2010 #1
    Dear all:

    I wonder how the adhesion between Al and Au is. I am going to deposit Au on top of Al layer.

  2. jcsd
  3. May 26, 2010 #2


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    The adhesion is not that good. In addition, there is a problem of intermetallic formation (look up "purple plague" on Wikipedia) that can cause problems. For this reason, in my past experience we deposited a Ti or Ti/W layer between the Al and the Au to improve adhesion and prevent intermetallic formation.
  4. May 27, 2010 #3
    Great hint. I am going to deposit about 200nm Au on Al layer. So you think it's better to deposit Ti between them? How thick this layer should be? 20nm is fine?

    Thank again.
  5. May 27, 2010 #4


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    Science Advisor

    Yes, I think the Ti layer would be a good idea. 20nm should be thick enough.
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