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Beam size question

  1. May 6, 2010 #1
    1. The problem statement, all variables and given/known data

    Does anyone know a method or calculation, that can calculate the size of an e-beam? I made a 40 square micron pattern, in approximately 30 seconds with 5pA current if this helps... I have no idea how to estimate the size of the beam tho.
  2. jcsd
  3. May 6, 2010 #2
    or does anyone know the average size of e-beams?
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