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Contact Resistance

  1. Apr 7, 2009 #1
    1. The problem statement, all variables and given/known data
    Aluminium contacts {100} p-doped silicon (10ohm/square) which has been implanted into a 200mm wafer (1 mm thick) by 100keV phosphorus at 7X10^15. What will be the resistance of a 1um^2 contact and will it be ohmic?

    2. Relevant equations

    Rc = Pc/A

    3. The attempt at a solution

    I determined Pc = thickness X Sheet Resistance

    But then, when I apply the given equation to obtain Rc, I am not getting answers in ohm-cm2 which should be the units of Rc.

    If I can get help with finding Rc, I can figure out if it is ohmic or not but I am stuck here. Please help!!!
  2. jcsd
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