Crystallization of HfO2

  • #1

Main Question or Discussion Point

HfO2 is considered to be used as a dielectric but if it crystallizes locally its electrical properties becomes unstable. This happens around 700-800 C, which is below where most semiconductor anneals require. Shouldn't this preclude its use?
 

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  • #2
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http://www.electrochem.org/meetings/scheduler/abstracts/210/1129.pdf [Broken]
 
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  • #3
Thanks for the paper link, very interesting. The conducting AFM is telling, since it always detects current through the dielectric, just a matter of degree of uniformity.
 

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