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Diamond in microelectromechanical systems

  1. Feb 6, 2010 #1
    Hi I am doing a research project into the use of diamond in MEMS and I've got a few questions for anyone who knows a bit about this field:

    1) What are the major uses of diamond in MEMS (I haven't found nearly as many as I would have expected)?

    2) Is Microwave plasma CVD the best way for coating elements such as Silicon with diamond in thin film coatings? Is PVD as good as CVD?

    3) Is there any advantage of coating with a carbon-diamond structure rather than fully diamond to get say a finer surface finish and thus less after-machining?

    4) What are the major disadvantages other than cost which can be ignored in this field?

    Any help would be much appreciated
  2. jcsd
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