Doubt in semiconductor sensors

  • Thread starter rama1001
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  • #1
rama1001
132
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what is planar technology?
 

Answers and Replies

  • #2
enrico85IT
2
0
Planar technology: working the silicon wafer surface by repeating a series of basic operations.

Heat treatment: diffusion, oxidation, tempering.
Deposition: CVD, epitaxy, evaporation.
lithography: definition of geometry.
chemical attacks: dry and wet for the selective removal of material.
doping: ion implantation and diffusion.
etc. etc.

These are the common procedures for the preparation of an integrated circuit.
 

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