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EDS/EDX system

  1. May 16, 2013 #1

    I have to look for a new EDS/EDX system for nano-analysis. We want to inspect structures fabricated by EBID technique of 3 nm diameter (we can imagine them with high voltages, from 5kV to 30kV, without any problem): spatial resolution is thus basilar.

    What kind of detector should I consider? A 10mm2 active area or a larger one?

    I contacted different companies and they are giving me complitely different suggestions (some of them said I should consider 10mm2 detectors, other at least 60mm2 detectors).
  2. jcsd
  3. Jul 4, 2013 #2
    Are you using FESEM for imaging the nano particle? What type- cold cathode?
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