Hi, I have to look for a new EDS/EDX system for nano-analysis. We want to inspect structures fabricated by EBID technique of 3 nm diameter (we can imagine them with high voltages, from 5kV to 30kV, without any problem): spatial resolution is thus basilar. What kind of detector should I consider? A 10mm2 active area or a larger one? I contacted different companies and they are giving me complitely different suggestions (some of them said I should consider 10mm2 detectors, other at least 60mm2 detectors).