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  1. Jun 10, 2012 #1
    Can someone help explain the difference between EDX(Energy-dispersive X-ray spectroscopy) vs. (XPS) X-ray photoelectron spectroscopy? Which is used for what application? Advantages/Disadvantages of each?

    From what I have been reading from documentation, they seem to be the same.

  2. jcsd
  3. Jun 10, 2012 #2


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    EDX/EDS measures X-rays emitted from a sample, while XPS measures photoelectrons emitted from a sample. They are somewhat related.

    "Energy-dispersive X-ray spectroscopy (EDS or EDX) is an analytical technique used for the elemental analysis or chemical characterization of a sample." "To stimulate the emission of characteristic X-rays from a specimen, a high-energy beam of charged particles such as electrons or protons (see PIXE), or a beam of X-rays, is focused into the sample being studied." The process relies on the uniquness of characteristic X-rays of each element.

    Ref: http://en.wikipedia.org/wiki/Energy-dispersive_X-ray_spectroscopy

    http://micron.ucr.edu/public/manuals/EDS-intro.pdf [Broken]



    X-ray photoelectron spectroscopy measures the characteristic photoelectrons emitted from a material. XPS spectra are obtained by irradiating a material with a beam of X-rays while simultaneously measuring the kinetic energy and number of electrons that escape from the top 1 to 10 nm of the material being analyzed. XPS requires ultra-high vacuum (UHV) conditions.

    Ref: http://en.wikipedia.org/wiki/X-ray_photoelectron_spectroscopy



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