Effective annealing parameters in N-doped Zinc oxide

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Main Question or Discussion Point

Good day every one!

Based on my research as you increased the temperature, the grain size become bigger and the thickness decreased, but in some paper, thickness increased. The effects of annealing temperature is almost the same to the temperature. But if you will considering doping for example nitrogen in Zinc oxide film, many papers suggest that as you increased the temperature and annealing time, there is an aging effect where Nitrogen concentration decreases. In my research my goal is to keep the the concentration of Nitrogen constant and have an enough crystal uniformity. So i will not consider higher temp like 500 and up (base on related literature) and longer annealing time. But what exactly the effective annealing temperature and annealing for N-doped zinc oxide?

Thanks in advance!
 

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