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Ellipsometry of thicker SiO2 film over bulk Si substrate

  1. Sep 15, 2015 #1
    Dear All,
    I hope you are good.

    But I am stuck in a measurement. I use JWoollam Ellipsometer and WVASE 32 software to perform ellipsometric measurements of a wafer which contains Silicon as substrate and SiO2 8 um as film over it. I performed a number of measurements on different points of the wafer but I could not fit the experimental data with models and the MSE is too high.

    However, in literature examples of SiO2 film as thick as 500 nm over Silicon substrate are available.

    If you can guide me, I shall be thankful.

  2. jcsd
  3. Sep 20, 2015 #2
    Thanks for the post! This is an automated courtesy bump. Sorry you aren't generating responses at the moment. Do you have any further information, come to any new conclusions or is it possible to reword the post?
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