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Etching Al2O3 but not Al

  1. May 29, 2014 #1

    I have a small challenge. I need to etch aluminium oxide but not aluminum. Does anyone know if this is possible? If yes how?

    It is for some microelectronic devices. Hence I can afford etching the aluminum.
  2. jcsd
  3. May 30, 2014 #2


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    Science Advisor
    Gold Member

    I think some kind of chelating agent such as EDTA might dissolve aluminum oxide but not aluminum.
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