Etching Al2O3 but not Al

  • Thread starter Excom
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  • #1
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Hi

I have a small challenge. I need to etch aluminium oxide but not aluminum. Does anyone know if this is possible? If yes how?

It is for some microelectronic devices. Hence I can afford etching the aluminum.
 

Answers and Replies

  • #2
hilbert2
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I think some kind of chelating agent such as EDTA might dissolve aluminum oxide but not aluminum.
 

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