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Etching of silicon wafer

  1. Sep 1, 2015 #1
    Regarding the anisotropic etching of the (110) silicon wafer, why will the (110) oriented wafers form perpendicular trenches with the (111)?
  2. jcsd
  3. Sep 7, 2015 #2
    Thanks for the post! This is an automated courtesy bump. Sorry you aren't generating responses at the moment. Do you have any further information, come to any new conclusions or is it possible to reword the post?
  4. Sep 14, 2015 #3
    If the etching is truly anisotropic, the walls of the etched features should be perpendicular to the surface of the wafer.
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