Etching TiO2

  • #1
Hi guys,

Please give me some suggestions about etching TiO2

TiO2, MgF2, and Cr2O3 are sputtered on silicon substrate. The top pattern is TiO2 with the

linewidth of 346nm. I would use E-beam to transfer pattern. The photoresist is PMMA.

The possible etchant I have searched for is hydrogen peroxide + sodium carbonate.

Is the fabrication process appropriate?

thanks a lot
 

Answers and Replies

  • #2
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