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Etching TiO2

  1. Jul 27, 2015 #1
    Hi guys,

    Please give me some suggestions about etching TiO2

    TiO2, MgF2, and Cr2O3 are sputtered on silicon substrate. The top pattern is TiO2 with the

    linewidth of 346nm. I would use E-beam to transfer pattern. The photoresist is PMMA.

    The possible etchant I have searched for is hydrogen peroxide + sodium carbonate.

    Is the fabrication process appropriate?

    thanks a lot
  2. jcsd
  3. Aug 1, 2015 #2
    Thanks for the post! This is an automated courtesy bump. Sorry you aren't generating responses at the moment. Do you have any further information, come to any new conclusions or is it possible to reword the post?
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