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Getting the concentration from Scanning Electron Microscope

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  1. Nov 8, 2012 #1
    Greetings!

    I am doing particle analysis using a JEOL 5310 Scanning Electron Microscope (SEM). Typically, people here in the lab report the results in % Element or % Atomic. I think the former refers to the weight percentage of an element and the latter to the stoichiometric ratio of elements with each other. Anyway, is there a way to get the concentration of the element of the particle in terms of ppm (parts per million)?

    Also, what to the fields in the EDX output mean? The Apparent conc., stat. sigma, k ratio, k ratio sigma, Inten. Corrn., Std. Corrn.?

    Here is an example output of an Energy Dispersive X-ray (EDX) analysis:
    ===================================================================
    SEMQuant results. Listed at 6:37:31 PM on 10/3/12
    Operator: Oxford
    Client: All ISIS users
    Job: Demonstration data SiLi detector
    Spectrum label:

    Calibration data: Energy Resn. Area
    Strobe: -8.8 49.21 90606
    Calib. element: 6915.1 140.83 37196
    Gain factor = 49.989
    Livetime = 100.0 seconds

    Sample data: Energy Resn. Area
    Strobe: -7.4 53.64 54030
    Total spectrum counts = 5342
    Livetime = 56.2 seconds

    System resolution = 70 eV

    Geometry (degrees):
    Tilt = 0.00

    ED geometry (degrees):
    Elevation = 45.00
    Azimuth = 0.00
    Entry angle = 0.00

    Accelerating voltage = 20.00 kV

    Quantitative method: ZAF ( 4 iterations).
    Analysed all elements and normalised results.

    Standards :
    C K CaCO3 01/12/93
    Cl K KCl 15/02/94
    Ca K Wollas 23/11/93
    V K V 01/12/93
    Co K Co 01/12/93
    Br K KBr 07/12/93
    Zr L Zr 01/12/93
    Au M Au 01/12/93
    Hg M HgTe 01/12/93


    Elmt Spect. Apparent Stat. k Ratio k Ratio
    Type Conc. Sigma Sigma

    C K ED 12.754 0.297 1.06280 0.02478
    Cl K ED 0.040* 0.032 0.00084* 0.00067
    Ca K ED 0.068* 0.044 0.00199* 0.00129
    V K ED 0.006* 0.048 0.00006* 0.00048
    Co K ED 0.030* 0.074 0.00030* 0.00074
    Br K ED 0.060* 0.461 0.00089* 0.00687
    Zr L ED 0.113* 0.150 0.00113* 0.00150
    Au M ED 2.021 0.177 0.02021 0.00177
    Hg M ED 0.128* 0.226 0.00210* 0.00370

    Elmt Spect. Inten. Std Element Sigma Atomic
    Type Corrn. Corrn. % % %

    C K ED 1.093 1.46 80.20 3.66 98.10
    Cl K ED 0.847 1.02 0.33* 0.26 0.13*
    Ca K ED 1.028 1.00 0.46* 0.29 0.17*
    V K ED 0.872 1.00 0.05* 0.38 0.01*
    Co K ED 0.880 1.00 0.23* 0.58 0.06*
    Br K ED 0.853 1.00 0.48* 3.70 0.09*
    Zr L ED 0.895 1.05 0.87* 1.14 0.14*
    Au M ED 0.844 1.05 16.44 1.43 1.23
    Hg M ED 0.929 1.05 0.95* 1.65 0.07*
    Total 100.00 100.00

    * = <2 Sigma

    ===================================================================


    Thank you very much for your help.
     
  2. jcsd
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