Hydrogen and phosphorus distribution in silicon oxide

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I want to know spatial distribution (concentration) of hydrogen and phosphorus in silicon oxide film with thickness of 1 micrometer. What is the simplest possible way to obtain such distributions with adequate resolution (~50 nm)?
 

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Thanks for the post! This is an automated courtesy bump. Sorry you aren't generating responses at the moment. Do you have any further information, come to any new conclusions or is it possible to reword the post?
 

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