Dismiss Notice
Join Physics Forums Today!
The friendliest, high quality science and math community on the planet! Everyone who loves science is here!

Localized discharge in RIE

  1. May 22, 2010 #1
    I have some questions on localized discharge in reactive ion etching. I just start studying etching ... it is a bit confusing.

    Please can someone explain me this sentence?
    "bromine containing plasmas have the tendency to form localized discharges. Localized discharges are particularly undesirable in reactive ion etching, since they will result in poor etch uniformity."

    My questions are:
    1- can you please give me some reference about localized discharge OR tell me what they are?
    2- why localized discharges are bad for etching uniformity?

    Thank you
  2. jcsd
Know someone interested in this topic? Share this thread via Reddit, Google+, Twitter, or Facebook

Can you offer guidance or do you also need help?
Draft saved Draft deleted

Similar Threads - Localized discharge Date
Justification for non-local and gradient constitutive models Jan 1, 2005