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Localized discharge in RIE

  1. May 22, 2010 #1
    I have some questions on localized discharge in reactive ion etching. I just start studying etching ... it is a bit confusing.

    Please can someone explain me this sentence?
    "bromine containing plasmas have the tendency to form localized discharges. Localized discharges are particularly undesirable in reactive ion etching, since they will result in poor etch uniformity."

    My questions are:
    1- can you please give me some reference about localized discharge OR tell me what they are?
    2- why localized discharges are bad for etching uniformity?

    Thank you
  2. jcsd
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