MEMS question

  1. ok so i need to find the resonance frequency of a accelometer, with 4 tethers/anchors.

    so in a assignment before this for a 2 beam system i used

    f= (k/2pi)*sqrroot[(ET^2)/12p*L^4]

    p being density

    so do i just times this by 2? and do i only use the density of the tethers or of the shuttle mass that has silicon and gold
     
  2. jcsd
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