MEMS spring structure analysis

[HappMatt]

Homework Statement

I am trying to analyze this structure to find its resonant frequency when activated with a electrostatic comb drive for a lab report. I know how to find electrostatic force but what I'm not so sure on what models to use for the semi circular spring.

Homework Equations

not sure, though I realize that there is no direct equation just estimates that can be based off known structures and possibly spring equations.

The Attempt at a Solution

have done some journal searching to find similar stucrtures but have not found anything and am not even sure what exactly to search for as far as KEY words. I have tried semi circular spring and other variants with no luck.

thanks for your direction

 

[KataKoniK]

Thank you for your question. In order to find the resonant frequency of a structure activated with an electrostatic comb drive, you will need to use a combination of equations and models. First, you will need to calculate the electrostatic force using the equation F = qE, where q is the charge and E is the electric field. Next, you will need to use a model for the semi-circular spring, such as Hooke's Law (F = -kx) or a more complex model such as the Timoshenko beam theory. Additionally, you may need to consider the effects of damping on the resonant frequency, which can be calculated using the equation f = 1/2π√(k/m), where k is the spring constant and m is the mass of the structure. As for keywords to use in your research, I suggest searching for "electrostatic comb drive resonant frequency" or "semi-circular spring modeling". I hope this helps and good luck with your lab report!