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Homework Help: MEMS spring structure analysis

  1. May 7, 2010 #1
    1. The problem statement, all variables and given/known data

    I am trying to analyze this structure to find its resonant frequency when activated with a electrostatic comb drive for a lab report. I know how to find electrostatic force but what I'm not so sure on what models to use for the semi circular spring.

    2. Relevant equations

    not sure, though I realize that there is no direct equation just estimates that can be based off known structures and possibly spring equations.

    3. The attempt at a solution

    have done some journal searching to find similar stucrtures but have not found anything and am not even sure what exactly to search for as far as KEY words. I have tried semi circular spring and other variants with no luck.

    thanks for your direction

    Attached Files:

  2. jcsd
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