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Plasma & temperature effects

  1. Aug 21, 2014 #1
    Ok small bit of a problem which I have been experiencing.
    I am using an industrial size plasma oven by advance plasma sytems. This plasma oven operates at an RF of 1600 watts for approx 8 minutes for the duration of the plasma cycle.
    It pulls down to a vacuum of 450mTorr and use oygen as a medium for firing the plasma.
    There are 6 shelves within the plasma oven.
    After temperature mapping the mapping the oven tehre was 1 significant find, shelves 3 & 4 once the RF kicked in the temperature rose from 20C to roughly 45C, on the other shelve the temp increase was only about 3C,(10 to 23 )
    What I am trying to figure out is what would cause teh increase on these 2 shelves? On further inspection there has been a slight leak noted upon the pipes for the cooling water on these 2 shelf level. As teh shelves are paired in a +/- config between shelving units is it a case taht the water is vaporising under for all intensive purposes what could be classified as a farraday cage? Is this water leak the most likely cause of teh temp increase.
    Common logic dictates that eliminating this leak and remapping the temperature is the way to go, but at present I would prefer to keep in the current state to run a body of trials and get greater understanding around this temperature increase.
    Any help/suggestions with would be greatly appreciated.
    Thanks in Advance
  2. jcsd
  3. Aug 28, 2014 #2
    I'm sorry you are not finding help at the moment. Is there any additional information you can share with us?
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