- #1
Zamot40
- 15
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I made some structures in PMMA and now I would like to even them out a little bit. The structures are made with thermal imprint and are 150 nm deep and with a period of 300 nm, which is the smallest stamp we have at the university, I could of course make a new stamp, but that would take a lot of time.
Right now I am considering annealing of the samples to make them soft and give it a long time in the oven and the PMMA will float a bit. eg. 150 degree Celcius for 2 hours.
I have also considered heating the oven to 1200 degree celsius and give it a short time, eg. 5 minutes.
If anyone has some experience or knowledge of this I would be happy
Right now I am considering annealing of the samples to make them soft and give it a long time in the oven and the PMMA will float a bit. eg. 150 degree Celcius for 2 hours.
I have also considered heating the oven to 1200 degree celsius and give it a short time, eg. 5 minutes.
If anyone has some experience or knowledge of this I would be happy