Dismiss Notice
Join Physics Forums Today!
The friendliest, high quality science and math community on the planet! Everyone who loves science is here!

Precursor is TiCl4

  1. Jul 4, 2006 #1
    Hi everyone!
    I'm doing some research on spin coating, my precursor is TiCl4 and I mix it with ethanol, but I have cracks on my films, can anyone help me?
     
  2. jcsd
  3. Jul 4, 2006 #2

    Astronuc

    User Avatar

    Staff: Mentor

    Is it a Ti-based substrate which you are coating? What is the temperature of the process?

    I see that the OP has been asked in the Chemistry forum with some elaboration. So let us address this problem there.

    Please do not use multiple posts. Thank you.
     
    Last edited: Jul 4, 2006
Know someone interested in this topic? Share this thread via Reddit, Google+, Twitter, or Facebook

Have something to add?