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Precursor is TiCl4

  1. Jul 4, 2006 #1
    Hi everyone!
    I'm doing some research on spin coating, my precursor is TiCl4 and I mix it with ethanol, but I have cracks on my films, can anyone help me?
  2. jcsd
  3. Jul 4, 2006 #2


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    Staff Emeritus
    Science Advisor

    Is it a Ti-based substrate which you are coating? What is the temperature of the process?

    I see that the OP has been asked in the Chemistry forum with some elaboration. So let us address this problem there.

    Please do not use multiple posts. Thank you.
    Last edited: Jul 4, 2006
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