- #1
kelvin490
Gold Member
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Is it possible to use vacuum evaporation, sputtering and ion plating processes to coat the inside walls of holes and other hollow shapes of substrates? I wonder whether the source materials are ejected in the form of atoms or ions? Many books say atom but how can they travel to the substrate if they don't have charge?
I have looked for several textbooks but cannot get a confirmed answer.
I have looked for several textbooks but cannot get a confirmed answer.