Problem with opticalmicroscopy of features near vertical sidewall of very deep trench Hi, I posted my question here: physicsforums.com/showthread.php?t=612780 but there may be more specialists here. Essentially I have a feature right next to a very deep vertical sidewall of the deep trench. The feature is technically geometrically within line of sight. The image cannot be focused. I believe it is related to the top part of the trench blocking off half of the light since it is being focused in from the high NA of the objective. Theres also possibly diffraction of light since half the focused light being blocked encounters an edge. Is this it? How do you overcome this issue? Is there a way to collimate the light at the top of the trench so it directs light uniformly straight down from the top of the trench to the intended feature so light reflects back up to the collimator and re-expanded back to the rest of the microscope? Is there something like dark field imaging? Perhaps cover the other half of the top illumination not contributing to observation?