Reason for change in deformation if we switch from n to p

  • #1
In the research paper, a piezoresistive pressure sensor is designed.
My question is if we look at table 1
in column 1 the values of deformation of diaphragm for single crystal silicon n type is used
If we interchange n type and p type the values for 1000,2000 Kpa are same and then the values changes, why ?
and why n,p type is not getting any deformation after 3000 Kpa ?
 

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Answers and Replies

  • #2
The reason why the values of deformation of the diaphragm for single crystal silicon n type and p type are different is because they have different mechanical properties. The n type silicon has a higher Young’s modulus and therefore experiences less deformation for the same pressure than the p type silicon. At 3000 Kpa, both n and p type silicon would not experience any deformation since this is the maximum pressure that the piezoresistive pressure sensor can measure.
 

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