1. Apr 27, 2005 #1

   osskall

   

   Hi! Is silicon inert? i.e. can I clean it from deposited films with e.g. HNO3 and H2SO4 without etching the silicon itself? What about amorphous carbon?

    

   osskall, Apr 27, 2005
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3. Apr 27, 2005 #2

   DrMark

   

   Common etches for Si are HF and caustics (NaOH, KOH). Nitric or sulfuric acid should be fine for cleaning it. Amorphous carbon electrodes I used to physically etch with "sandpaper" and routinely used them in HCLO₄, HCl, HNO₃ etc.

    

   DrMark, Apr 27, 2005

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