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Sputter deposition: Difference between sputter up and sputter down configurations

  1. Aug 17, 2009 #1
    Sputter deposition: Difference between "sputter up" and "sputter down" configurations

    My research group is considering purchasing a new sputtering system for our lab and I've found two configurations for the sputter sources: "sputter up" and "sputter down." What are the advantages/disadvantages of each configuration?

    Sputter-up Diagram
    10nwd2o.jpg

    Sputter-down Diagram
    1zbeago.jpg

    Source: http://www.ajaint.com/systems_orion.htm" [Broken]
     
    Last edited by a moderator: May 4, 2017
  2. jcsd
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