Dismiss Notice
Join Physics Forums Today!
The friendliest, high quality science and math community on the planet! Everyone who loves science is here!

Sputter deposition: Difference between sputter up and sputter down configurations

  1. Aug 17, 2009 #1
    Sputter deposition: Difference between "sputter up" and "sputter down" configurations

    My research group is considering purchasing a new sputtering system for our lab and I've found two configurations for the sputter sources: "sputter up" and "sputter down." What are the advantages/disadvantages of each configuration?

    Sputter-up Diagram

    Sputter-down Diagram

    Source: http://www.ajaint.com/systems_orion.htm" [Broken]
    Last edited by a moderator: May 4, 2017
  2. jcsd
Share this great discussion with others via Reddit, Google+, Twitter, or Facebook

Can you offer guidance or do you also need help?
Draft saved Draft deleted