TiO2 spin coating

  • Thread starter venus
  • Start date
  • #1
2
0

Main Question or Discussion Point

Hi everyone!
I'm doing some research on spin coating, my precursor is TiCl4 and I mix it with ethanol, but I have cracks on my films, can anyone help me?
The reaction is:
Ticl4+ ethanol ---> TiO2 + HCl +....
What effects does the pH and the type of alcohol used have? How can I change the viscosity ? Can anyone tell me what happens chemically in this reaction?
 

Answers and Replies

  • #2
Astronuc
Staff Emeritus
Science Advisor
18,821
2,009
Is it a Ti-based substrate which you are coating? What is the temperature and pressure of the process?

Surface tension (wettability) of the solution could be a factor. Have you looked at what other people have done regarding chemical deposition of TiO2 films.

The reaction is:
Ticl4+ ethanol ---> TiO2 + HCl +....
What is the water content of the ethanol? One might be getting TiCl4 + 2 H2O -> TiO2 + 4 HCl and perhaps there are some intermediates that interfere with the precipitation process and hence the cracking.
 

Related Threads on TiO2 spin coating

  • Last Post
Replies
1
Views
724
  • Last Post
Replies
23
Views
24K
  • Last Post
Replies
3
Views
20K
  • Last Post
Replies
1
Views
4K
  • Last Post
Replies
4
Views
2K
  • Last Post
Replies
22
Views
5K
  • Last Post
Replies
1
Views
2K
Replies
2
Views
682
Replies
2
Views
854
  • Last Post
Replies
6
Views
3K
Top