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TiO2 spin coating

  1. Jul 4, 2006 #1
    Hi everyone!
    I'm doing some research on spin coating, my precursor is TiCl4 and I mix it with ethanol, but I have cracks on my films, can anyone help me?
    The reaction is:
    Ticl4+ ethanol ---> TiO2 + HCl +....
    What effects does the pH and the type of alcohol used have? How can I change the viscosity ? Can anyone tell me what happens chemically in this reaction?
  2. jcsd
  3. Jul 4, 2006 #2


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    Staff Emeritus
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    Is it a Ti-based substrate which you are coating? What is the temperature and pressure of the process?

    Surface tension (wettability) of the solution could be a factor. Have you looked at what other people have done regarding chemical deposition of TiO2 films.

    What is the water content of the ethanol? One might be getting TiCl4 + 2 H2O -> TiO2 + 4 HCl and perhaps there are some intermediates that interfere with the precipitation process and hence the cracking.
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