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To measure the capacitance of interdigitated metal electrode

  1. Aug 12, 2009 #1
    Hi, Could someone give me some basic idea or information
    1. How to measure the capacitance of interdigitated metal electrode of about 250 nm wide and 2 mm long on a silicon wafer, spacing between the electrode is 250 nm which is bonded bonded to copper pads.
    2. Is it possible to measure the capacitance with time delay ?
    3. Is it possible to cross check with commercial capacitance of some pico or nano fard ? how should circuit connection be made ?
    4. What will be order of electric filed with respect to electrode ?

    Will be grateful if you could enlighten me for better understanding. Thanks
     
  2. jcsd
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