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A UVSE vs visible spectroscopic ellipsometer

  1. Aug 4, 2017 #1
    How is the UV spectroscopic ellipsometer better than a visible spectroscopic ellipsometer?

    A spectroscopic ellipsometer measures thin film thicknesses and indices of refraction by measuring phase difference (delta) and amplitude change (psi). It is plotted on a reflectance vs. wavelength graph, which is better than a single wavelength ellipsometer because the single wavelength ellipsometer only measures at one wavelength and can only measure the thickness of a single transparent layer and the refractive index of that wavelength, and a multiwavelength ellipsometer (spectroscopic ellipsometer) is more accurate because it measures at a spectrum of wavelengths and can be used for multilayer stacks and thin films.

    I believe that the UV spectroscopic ellipsometer is more accurate than the visible spectroscopic ellipsometer because of the properties of the material under UV light. Is this true? Why?
  2. jcsd
  3. Aug 9, 2017 #2
    Thanks for the thread! This is an automated courtesy bump. Sorry you aren't generating responses at the moment. Do you have any further information, come to any new conclusions or is it possible to reword the post? The more details the better.
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