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VLSI technology

  1. Jul 9, 2014 #1
    I need someone to check my home work

    wafer preparation

    3. The attempt at a solution

    material for wafer preparation
    raw material - silicon is raw material

    MGS metalluragical grade silicon
    EGS electron grade silicon


    wafer making equipment

    crucible pure silicon is placed in crucible that is made of quartz
    crucible supporter
    vacuum chamber crucible is then put in vacuum chamber which is sealed and then filled with some gas
    heater

    the chamber is heated up to 1500 c to melt silicon
    crucible shaft
    when silicon is melted nicely the seed is rotated as it slowly pulled out of molten silicon


    is it all equipment or we need another
     
  2. jcsd
  3. Jul 9, 2014 #2

    SteamKing

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    Staff Emeritus
    Science Advisor
    Homework Helper

    The Rules at PF ask that you follow the HW template when asking a HW type question.
     
  4. Jul 9, 2014 #3

    berkeman

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    Staff: Mentor



    Your post makes no sense, especially without the Homework Help Template that you were provided.

    What is the exact problem statement?

    What are the relevant materials and processes?

    What part of what you posted is your attempt at the solution?
     
  5. Jul 10, 2014 #4
    1. The problem statement, all variables and given/known data

    I am not sure that my home work is correct or wrong
    someone please check out this

    2. Relevant equations

    I have goofle and I read some pdf file


    wafer preparation


    3. The attempt at a solution



    material for wafer preparation
    raw material - silicon is raw material

    MGS metalluragical grade silicon
    EGS electron grade silicon


    wafer making equipment

    crucible pure silicon is placed in crucible that is made of quartz
    crucible supporter
    vacuum chamber crucible is then put in vacuum chamber which is sealed and then filled with some gas
    heater

    the chamber is heated up to 1500 c to melt silicon
    crucible shaft
    when silicon is melted nicely the seed is rotated as it slowly pulled out of molten silicon

    IS it enough to post question on the forum ?
     
  6. Jul 10, 2014 #5

    berkeman

    User Avatar

    Staff: Mentor

    What is the exact problem statement from your homework?
     
  7. Jul 13, 2014 #6
    does any one know the equipment that is used in vlsi technology

    chamber , quartz tube ,furnace

    which equipment used for oxidation , ion implantation and diffusion
     
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