Indium tin oxide - thickness question

johng23

I read that the thickness of an ITO film affects performance as a trade off between transparency and conductivity. How thick can ITO be and still remain reasonably transparent to visible light? I found a couple papers which characterize the transmittance but only out to 500 nm or so. Could it be a couple microns thick and still transmit most visible light (400 or 800 nm wavelength)?

johng23

Forget that - could anyone tell me which deposition method would be suitable for depositing a 5-10 micron film? Or even 15?