EDX vs. XPS

ninthwonder

Can someone help explain the difference between EDX(Energy-dispersive X-ray spectroscopy) vs. (XPS) X-ray photoelectron spectroscopy? Which is used for what application? Advantages/Disadvantages of each?

From what I have been reading from documentation, they seem to be the same.

Thanks.

Astronuc

EDX/EDS measures X-rays emitted from a sample, while XPS measures photoelectrons emitted from a sample. They are somewhat related.

"Energy-dispersive X-ray spectroscopy (EDS or EDX) is an analytical technique used for the elemental analysis or chemical characterization of a sample." "To stimulate the emission of characteristic X-rays from a specimen, a high-energy beam of charged particles such as electrons or protons (see PIXE), or a beam of X-rays, is focused into the sample being studied." The process relies on the uniquness of characteristic X-rays of each element.

Ref: http://en.wikipedia.org/wiki/Energy-...y_spectroscopy

http://micron.ucr.edu/public/manuals/EDS-intro.pdf

http://mee-inc.com/eds.html

http://serc.carleton.edu/research_ed...heets/eds.html


X-ray photoelectron spectroscopy measures the characteristic photoelectrons emitted from a material. XPS spectra are obtained by irradiating a material with a beam of X-rays while simultaneously measuring the kinetic energy and number of electrons that escape from the top 1 to 10 nm of the material being analyzed. XPS requires ultra-high vacuum (UHV) conditions.

Ref: http://en.wikipedia.org/wiki/X-ray_p...n_spectroscopy


http://www.phi.com/surface-analysis-techniques/xps.html

http://www.eaglabs.com/mc/x-ray-phot...ctroscopy.html

http://mmrc.caltech.edu/SS_XPS/XPS_PPT/XPS_Slides.pdf