DC Sputtering of Silicon without Magnetron


by LancelotSE
Tags: magnetron, silicon, sputtering
LancelotSE
LancelotSE is offline
#1
Mar7-13, 04:19 PM
P: 1
My question has to do with Sputtering Silicon onto a substrate using DC without a Magnetron. The system in the lab I'm at isn't currently capable of RF sputtering and the status of the magnetron is unknown. Is there any way to use a sputter with DC to deposit Silicon onto a substrate?

On the off chance anyone knows, is there a way to sputter Aluminum Oxide onto a substrate without a magnetron, RF, or exposing the chamber to the atmosphere? We need a deposition that's around 50nm-250nm thick.

Any help would be appreciated!
Phys.Org News Partner Engineering news on Phys.org
Fiber-optic microscope will help physicians detect cancer, diseases at early stages
Wind tunnel tests support improved aerodynamic design of B61-12 bomb
Smart sensor technology to combat indoor air pollution
Graniar
Graniar is offline
#2
Mar8-13, 07:41 AM
P: 71
Due to silicon conductivity, you may try use silicon samples as electrodes to create plasma between them. Some small residual pressure need for igniting at least by cathode ray.
I don't remember exact numbers, when I experimented, something about 70V was enough for Hg plasma ignition without prior heating for Thungsten electrodes at about 0.1 Pa. Your case will require some more voltage due to increased Silicon work function and ionization energy, but, I suppose DC 318V achievable from AC 220V is quite enough. Don't forget about nonlinear V/I function, use inductance or resistance.
Graniar
Graniar is offline
#3
Mar8-13, 08:01 AM
P: 71
For dielectric compounds at high vacuum I would try modify regular CRT monitor to increase beam power or decrease scanning rate. Remove the front glass and point it to the sample. But don't you think it will be easier than get regular magnetron?


Register to reply

Related Discussions
doubt regarding silicon waffers and silicon diodes Atomic, Solid State, Comp. Physics 12
doubt regarding silicon waffers and silicon diodes Atomic, Solid State, Comp. Physics 1
Argon sputtering onto Al(111) Advanced Physics Homework 0
silicon/silicon dioxide thin fillm multistack Materials & Chemical Engineering 9
How is the process of RF magnetron sputtering? Introductory Physics Homework 0