I am interested in adding simultaneously O2 and H2 in a magnetron sputtering discharge ignited in Ar at a pressure of 3*10-2 mbar. The discharge is driven by a RF generator (13.56 MHz, 60 - 120W). The target is W. Can anyone told me if I can expect at any explsion to apear due to simultanoously...
Hi!
There are a lot of plasma physics journals.
Plasma Sources Sci. Technol.,... but you can find papers on plasma in other journals, like Appl. Phys. Lett...
An alternative is
http://iopscience.iop.org/collections?collection_type=LATEST_PAPERS
You have to register (free) and you have access to...