Recent content by Fikadu

Dear Helmholtzerton, Thank you very much for your helpful comment. Depend on power frequency , the Chamber operates as inductive or capacitive. Plasma is being generated at a pressure of 1.3 torr. But some times it fluctuates up and down. might this be a reason? Thank you a lot

Dear, Thank you very much for your help. 1. The RF frequency is 13.56MHz. 2. The dimension of the chamber ≈ 50 cm x 60cm x 30 cm( Width x Length x Height ) 3. The RF Voltage , Current and phase difference are captured through VI sensor. From these, Forward power, reflected power and...

[FONT=Georgia]Dear all, is there anyone with plasma background? I am developing an algorithm for a plasma impedance L type matching network. Initially, I set the Load and Tune units to some specific positions. The algorithm is simply tuning a possible minimum SWR starting from the...