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DC Sputtering of Silicon without Magnetron
My question has to do with Sputtering Silicon onto a substrate using DC without a Magnetron. The system in the lab I'm at isn't currently capable of RF sputtering and the status of the magnetron is unknown. Is there any way to use a sputter with DC to deposit Silicon onto a substrate? On the...- LancelotSE
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- Dc Silicon Sputtering
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- Forum: Materials and Chemical Engineering